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Semiconductor Technologies
Carl Zeiss SMT GmbH

Carl Zeiss SMT utilizes its globally leading know-how in light, electron and ion-optical technologies to offer its customers in the manufacturing industry and R&D a broad portfolio of products, services and application solutions.

As the innovation leader Carl Zeiss SMT opens up new avenues in industrial manufacturing environments, quality assurance and industrial and university R&D.
Product portfolio
Semiconductor Metrology Systems
Mask Evaluation
Mask Repair/Tuning
Mask Metrology
Mask Processing

Laser Optics Systems
OEM Modules
Synchrotron Optics

Lithographic Systems
Optics for EUV
Optics for 193 nm Immersion Lithography
Optics for 193 nm
Optics for 248 nm
Optics for 365 nm
News
BMBF Joint Project for New Chip Fabrication Technology – Key Milestone Successfully Achieved
Carl Zeiss System PROVE™ passed Final Acceptance at NuFlare Technology
RegC™ Product Launch
Carl Zeiss launched a new system for photomask registration correction
All press releases